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Optical activation of a silicon vibrating sensor

Repositori DSpace/Manakin

dc.contributor.author	Andrés, Miguel V.
dc.contributor.author	Foulds, K.W.H.
dc.contributor.author	Tudor, M.J.
dc.date.accessioned	2022-03-03T15:26:27Z
dc.date.available	2022-03-03T15:26:27Z
dc.date.issued	1986
dc.identifier.citation	Andrés, Miguel V. Foulds, K.W.H. Tudor, M.J. 1986 Optical activation of a silicon vibrating sensor Electronics Letters 22 21 1097 1099
dc.identifier.uri	https://hdl.handle.net/10550/81814
dc.description.abstract	The operation of a micromachined silicon vibrating sensor with both optical excitation and optical interrogation is reported. The proper locations at which the optical excitation should be applied for optimum excitation of different modes of resonance are described.
dc.language.iso	eng
dc.relation.ispartof	Electronics Letters, 1986, vol. 22, num. 21, p. 1097-1099
dc.subject	Òptica
dc.subject	Vibració
dc.title	Optical activation of a silicon vibrating sensor
dc.type	journal article	es_ES
dc.date.updated	2022-03-03T15:26:27Z
dc.identifier.doi	10.1049/el:19860752
dc.identifier.idgrec	081047
dc.rights.accessRights	open access	es_ES