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Sensitivity and mode spectrum of a frequency-output silicon pressure sensor
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Sensitivity and mode spectrum of a frequency-output silicon pressure sensor
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| dc.contributor.author | Andrés, Miguel V. | |
| dc.contributor.author | Tudor, M.J. | |
| dc.contributor.author | Foulds, K.W.H. | |
| dc.date.accessioned | 2022-03-10T13:26:49Z | |
| dc.date.available | 2022-03-10T13:26:49Z | |
| dc.date.issued | 1988 | |
| dc.identifier.citation | Andrés, Miguel V. Tudor, M.J. Foulds, K.W.H. 1988 Sensitivity and mode spectrum of a frequency-output silicon pressure sensor Sensors and Actuators 15 417 426 | |
| dc.identifier.uri | https://hdl.handle.net/10550/81896 | |
| dc.description.abstract | The vibrational mode spectrum of a silicon vibrating pressure sensor is investigated. | |
| dc.language.iso | eng | |
| dc.relation.ispartof | Sensors and Actuators, 1988, vol. 15, p. 417-426 | |
| dc.subject | Física | |
| dc.title | Sensitivity and mode spectrum of a frequency-output silicon pressure sensor | |
| dc.type | journal article | es_ES |
| dc.date.updated | 2022-03-10T13:26:49Z | |
| dc.identifier.doi | 10.1016/0250-6874(88)81510-5 | |
| dc.identifier.idgrec | 081054 | |
| dc.rights.accessRights | open access | es_ES |
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