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Nonlinear vibrations and hysteresis of micromachined silicon resonators designed as frequency-out sensors

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Valencià Castellano

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Nonlinear vibrations and hysteresis of micromachined silicon resonators designed as frequency-out sensors

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Andrés, Miguel V.; Foulds, K.W.H.; Tudor, M.J.

Aquest document és un/a article, creat/da en: 1987

Experimental observation of nonlinear vibrations and hysteresis of micromachined silicon resonators is reported. The experimental results are explained using a simple model in which the restoring force acting in the resonator contains a small cubic term. The effects will impose a limit to the maximum amplitude which can be excited while still maintaining reliability of these devices as frequency-out sensors.

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