NAGIOS: RODERIC FUNCIONANDO

Nonlinear vibrations and hysteresis of micromachined silicon resonators designed as frequency-out sensors

Repositori DSpace/Manakin

dc.contributor.author	Andrés, Miguel V.
dc.contributor.author	Foulds, K.W.H.
dc.contributor.author	Tudor, M.J.
dc.date.accessioned	2022-03-03T15:56:12Z
dc.date.available	2022-03-03T15:56:12Z
dc.date.issued	1987
dc.identifier.citation	Andrés, Miguel V. Foulds, K.W.H. Tudor, M.J. 1987 Nonlinear vibrations and hysteresis of micromachined silicon resonators designed as frequency-out sensors Electronics Letters 23 18 952 954
dc.identifier.uri	https://hdl.handle.net/10550/81816
dc.description.abstract	Experimental observation of nonlinear vibrations and hysteresis of micromachined silicon resonators is reported. The experimental results are explained using a simple model in which the restoring force acting in the resonator contains a small cubic term. The effects will impose a limit to the maximum amplitude which can be excited while still maintaining reliability of these devices as frequency-out sensors.
dc.language.iso	eng
dc.relation.ispartof	Electronics Letters, 1987, vol. 23, num. 18, p. 952-954
dc.subject	Semiconductors
dc.subject	Materials
dc.title	Nonlinear vibrations and hysteresis of micromachined silicon resonators designed as frequency-out sensors
dc.type	journal article	es_ES
dc.date.updated	2022-03-03T15:56:12Z
dc.identifier.doi	10.1049/el:19870670
dc.identifier.idgrec	081052
dc.rights.accessRights	open access	es_ES